What is FOUP in semiconductor?
FOUP is an acronym for Front Opening Unified Pod or Front Opening Universal Pod. It is a specialised plastic enclosure designed to hold silicon wafers securely and safely in a controlled environment, and to allow the wafers to be transferred between machines for processing or measurement.
How many wafers are in a FOUP?
In most semiconductor companies wafers travel through 300-mm wafer fabs in FOUPs containing a maxi- mum of 25 wafers. Due to the increase in wafer size, a FOUP full of 300-mm wafers can weigh in excess of 40 pounds.
Who makes FOUPs?
With over 50 years of experience in advanced wafer handling and transport, Entegris continues to provide 100 mm (4″) wafer processing solutions to safely and reliably transport and protect silicon wafers.
What is load port in semiconductor?
The RFID-based Smart Load Port (SLP) is a station for the manual input and output of 300mm FOUPs or 200mm SMIF pods into or out of an automatic overhead transport system in a semiconductor fab. The integrated RFID technology ensures automatic lot identification for during loading and unloading process.
How do you pronounce Foup?
Pronunciation
- IPA: /fuːp/
- Audio (US) 0:01. (file)
- Rhymes: -uːp.
What is SMIF pod?
The purpose of SMIF pods is to isolate wafers from contamination by providing a miniature environment with controlled airflow, pressure and particle count. SMIF pods can be accessed by automated mechanical interfaces on production equipment.
What is a SMIF pod?
What is FOSB semiconductor?
The wafer carrier box used in moving from a wafer manufacturer to a semiconductor manufacturer is called a Front Opening Shipping Box (FOSB), and a carrier box used in a semiconductor manufacturing process line is called a Front Opening Unified Pod (FOUP).
What is a load port?
Port of Loading is a port or a place where goods are loaded aboard a ship, secured and ready to be transported. POL can also be called the port of exit.
What is FOSB and Foup?
Our relentless pursuit of purity has led to front opening shipping boxes (FOSB), front opening unified pods (FOUP), and horizonal wafer shippers (HWS) manufactured from scientifically engineered, custom-compounded polymers with clean carbon loading designed to reduce contaminants.
What is Pol pod?
POL (Port of Loading) The first port where cargo is loaded on the ocean vessel (mother or feeder vessel). POD (Port of Discharge) The last port where cargo is discharged from the ocean vessel (mother or feeder vessel) for inland transportation.